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        EESemi.com Forum Archives 
		
        
        EDX Dead Time and Input Rate 
                       
        
        
        
        
        
                
        
        
              
		        
         
        
        
        
        
        
        
        
        
        
        
        
        
		EDX analysis is 
		one failure analysis technique that takes time and experience to master.  
		Used for identifying the elemental composition of a sample, EDX analysis 
		is performed on a SEM that is equipped with an EDX system. An EDX system 
		operates by counting X-ray emissions from a sample according to their 
		energy content.  The X-ray counts are plotted in histogram format 
		(with the energy levels on the x-axis), forming an EDX spectrum. The EDX 
		specturm formed contains peaks that correspond to the elements present 
		in the sample. 
		
           
		 
		
        One challenge 
		in operating an EDX system is ensuring that enough X-ray emissions are 
		counted and plotted to come up with a valid EDX spectrum.  "Dead 
		time", or the period wherein no emission counts are made, must not be 
		excessive.  Excessive dead time means that not enough counts are 
		being registered, causing an EDX spectrum with no peaks. The "standard" 
		for the correct 'dead time' versus count rate varies from one EDX system 
		to another, so it is important for a failure analyst to be familiar with 
		his or her system and its calibration standards. The archived forum 
		thread below reflects the challenges in using an EDX system, as well as 
		the differences among various EDX systems used in the industry. 
		
            
        
		
			
				
				
					
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						Posted by Longier: Sat 
						Aug 19, 2006 12:31 pm    Post 
						subject: EDX question about deadtime and input rate?  | 
					 
					
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						Using the Oxford/Hitachi and Horriba/Hitachi 
						EDX system, I have the following questions:
						 
						
        
						
						
						 
						
      
        
        
        
        
        
        
        
        
        
        
						
						1. The relation between the input rate and deadtime? The 
						Horriba service engineer tells me that we should ensure 
						the input rate no less than 5kcps and the deadtime to be 
						about 30% when performing the microanaylsis , however, 
						Oxford engineer give some advice that should promise the 
						the input rate to be approximately 3 kcps and the 
						deadtime maybe less than 10% in this case. in fact, the 
						Horriba system and Oxford
						system have the same hardware and software.  
						
        
						
						
						 
						
      
        
        
        
        
        
        
        
        
        
        
						
						2. Generally, I use 20KV acceleration voltage to do EDS, 
						to get the most reliable EDS results, how to balance the 
						input ratemeter and deadtime?   | 
					 
				 
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						Posted by FARel Engr: 
						Mon Aug 21, 2006 6:17 pm   
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						It's really a balancing act to 
						avoid getting too many xray counts (which may indicate 
						that some 'invalid' xrays are being counted and can 
						cause spectrum distortion) or getting too little of them 
						(which can result in an erroneous spectrum if the 
						'right' xrays are not being counted). To get the dead 
						time that we want, we try to optimize the probe current 
						and the spot size, assuming that everything in the 
						hardware is perfectly aligned and working.  | 
					 
				 
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						Posted by Longier: Mon 
						Aug 21, 2006 10:59 pm    Post 
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						Very thanks for your reply. Would you tell me how to 
						optimize the probe current and the spot size to get the 
						satisfied deadtime? do you have some experience or 
						standards sharing with me?   | 
					 
				 
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						Posted by FARel Engr: 
						Tue Aug 22, 2006 11:17 am   
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						Sorry, but no standards for these 
						inputs can be defined since xray emission and counting 
						vary from one specimen to another. That's the reason why 
						the standardization was defined in terms of the output, 
						i.e., dead time and counts per sec. Good luck!  | 
					 
				 
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						Posted by Cvill: Thu 
						Feb 01, 2007 2:15 pm    Post 
						subject:   | 
					 
					
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						How different is the Horriba, 
						Oxford and Kevex?  
						 
						For Kevex, deadtime and cps can be adjusted using the 
						fast discriminators in the pulse processor setup.
						However, it doesn't help me much because if I go for 1 
						to 2kcps, the deadtime shoots up to 100% and sometimes 
						give an "No x-ray detected" message.  
						 
						What am I doing wrong? Does it have to do that I'm 
						trying a 5kV analysis? We're doing some sulfur 
						contamination evaluation and this was required by our 
						customer. Is there a better way to determine sulfur?  | 
					 
				 
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						Posted by FARel Engr: 
						Fri Feb 02, 2007 7:33 pm   
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						Try to get a set-up that achieves about 30% dead time 
						only. If you've done everything and still can't get any 
						x-ray counts, then 5 kV may indeed be too low for what 
						you are trying to detect.  
						 
						What is the lowest K-alpha peak of sulfur - do you 
						remember? If I recall it right, it's somewhere around 
						2.3 kV right? If so, then 5 kV should be enough to 
						detect it if it's present.  
						 
						What is the specimen you're trying to analyze? If it's a 
						bond pad, then 5 kV should have no problems detecting 
						Al, so Al should at least register in the spectrum. If 
						Al can't be detected at 5 kV, then there's something 
						wrong.  
						 
						I suggest that you check your EDX with a cal standard, 
						just to make sure that the hardware is really OK.   | 
					 
				 
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						Posted by Longier: Thu 
						Mar 27, 2008 6:26 pm    Post 
						subject:   | 
					 
					
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						Now I use the Germany Bruker-AXS 
						company's SDD XFlash Detector 4010 (No Liquid Nitrogen 
						EDS system), this EDS can reach energy resolution 125eV 
						(less than 133 eV), however, the conventional LN2 EDS 
						can just reach 133 or 137eV and the 125eV can be 
						specified at 100,000 cps.  
						 
						The deadtime is less than 10% when the input rate 
						arrived 10,000cps, the performing time is also 10 times 
						faster than LN2 EDS system.
						No need for anybody to add LN2 or maintenance is the most 
						improtant and convenient.   | 
					 
				 
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